6. Micro/Nano Scale Systems

MSE 501: Microsystems Principles 0-3-3. Fundamentals of Microsystems, emphasizing the basic principles, materials, fabrication, measurement, and applications of microsystems. (Fall)

MSE 502: Microfabrication Principles 0-3-3. Fundamentals of microfabrication processes for the realization of microelectromechanical and microelectronic devices. (Winter)

MSE 504: Advanced Materials for Micro/Nano Devices and Systems 0-3-3. Preq. MSE 501. Fundamentals of advanced materials used for the realization of micro/nano devices and systems, emphasizing the properties and characteristics of various materials.

MSE 506: Micro/Nano Scale Materials, Measurements, and Analysis 0-3-3. Fundamentals of micro/nano scale materials, measurements, and analysis, based on modern techniques.